Semiconductor device having super junction metal oxide semiconductor structure and fabrication method for the same

ABSTRACT

A semiconductor device includes: a first base layer; a drain layer disposed on the back side surface of the first base layer; a second base layer formed on the surface of the first base layer; a source layer formed on the surface of the second base layer; a gate insulating film disposed on the surface of both the source layer and the second base layer; a gate electrode disposed on the gate insulating film; a column layer formed in the first base layer of the lower part of both the second base layer and the source layer by opposing the drain layer; a drain electrode disposed in the drain layer; and a source electrode disposed on both the source layer and the second base layer, wherein heavy particle irradiation is performed to the column layer to form a trap level locally.

This is a Continuation of U.S. application Ser. No. 15/173,652, filed onJun. 4, 2016, and allowed on May 15, 2017, which is a Continuation ofU.S. application Ser. No. 14/320,671 filed on Jul. 1, 2014, and issuedas U.S. Pat. No. 9,385,217 on Jul. 5, 2016, which is a Continuation ofU.S. application Ser. No. 13/922,441, filed on Jun. 20, 2013, and issuedas U.S. Pat. No. 8,802,548 on Aug. 12, 2014, which was a Divisional ofU.S. application Ser. No. 12/737,912, filed on Feb. 28, 2011, and issuedas a U.S. Pat. No. 8,492,829 B2 on Jul. 23, 2013, which was a NationalStage application of PCT/JP2009/065171, filed Aug. 31, 2009, and claimsthe benefit of the following Japanese Patent application 2008-223370,filed on Sep. 1, 2008, the subject matters of which are incorporatedherein by reference.

TECHNICAL FIELD

The present invention relates to a semiconductor device and afabrication method for such semiconductor device. In particular, thepresent invention relates to a semiconductor device having a superjunction Metal Oxide Semiconductor (MOS) structure, and a fabricationmethod for such semiconductor device.

BACKGROUND ART

When a MOS Field Effect Transistor (FET) is composed in a bridgecircuit, three power loss reductions are required.

The first power loss is on-state power loss. The on-state power loss isa power loss associated with current flowing through a channel of theMOSFET, and reduction of the on resistance of the MOSFET is required.

The second power loss is a switching power loss associated with turn-onswitching. In order to reduce the switching power loss associated withthe turn-on switching, it is required that a turn-on switching timeperiod should be shortened by increasing a gate sensitivity of theMOSFET and reducing an amount of gate charge Qg needed for the turn-onswitching.

The third power loss is a switching power loss associated with theturn-off switching, and is called “through loss”. In order to reduce thethrough loss, it is required that the turn-off switching time should beshortened by shortening Reverse Recovery Time trr of the MOSFET.

As shown in FIG. 11, a MOSFET of planar structure as a semiconductordevice related to a conventional example includes: a high resistivityfirst base layer 12 of a first conductivity type; a drain layer 10 ofthe first conductivity type formed on the back side surface of the firstbase layer 12; a second base layer 16 of a second conductivity typeformed on the surface of the first base layer 12; a source layer 18 ofthe first conductivity type formed on the surface of the second baselayer 16; a gate insulating film 20 disposed on the surface of both thesource layer 18 and the second base layer 16; a gate electrode 22disposed on the gate insulating film 20; and an interlayer insulatingfilm 24 disposed on the gate electrode 22. In FIG. 12, the illustrationis omitted about a drain electrode disposed on the drain layer 10, and asource electrode disposed on both the source layer 18 and the secondbase layer 16.

FIG. 12 shows an example of a switching waveform of the semiconductordevice related to the conventional example.

Although the MOSFET including the super junction MOS structure denoteshigher performance in respect of both the switching power loss and theon-state power loss compared with the MOSFET of the conventional planarstructure, the performance is poor in respect of the through loss.

That is, the super junction MOSFET includes a column layer of the secondconductivity type formed in the first base layer 12 of the lower part ofboth the second base layer 16 and the source layer 18 by opposing thedrain layer 10. Accordingly, the on resistance is reduced and the gatesensitivity increases, the amount of gate charge Qg needed for theturn-on switching is reduced, and thereby the turn-on switching timeperiod can be shortened. On the other hand, since the column layer isincluded, a pn junction area increases, the reverse recovery time trrincreases, and thereby the turn-off switching time is increased. Herein,the amount of gate charge Qg is defined as an amount of charge neededfor a voltage V_(GS) between the gate and the source in order to reach10 V, for example.

Generally, a method of using diffusion of a heavy metal and a method ofelectron irradiation are known as technology for shortening the reverserecovery time trr. According to the above-mentioned methods, althoughthe reverse recovery time trr can be shortened, since thecontrollability for forming a trap level is wrong, there is a problemthat the leakage current between the drain and the source increases.

Also, in an Insulated Gate Bipolar Transistor (IGBT), it is alreadyproposed about a technology for forming locally a life-time controledlayer (for example, refer to Patent Literature 1).

Moreover, in the IGBT, it is already also disclosed about a technologyfor irradiating only a predetermined region with an electron ray byusing a source electrode formed with aluminum as wiring and using as amask of electron irradiation (for example, refer to Patent Literature2).

Patent Literature 1: Japanese Patent Application Laying-Open PublicationNo. H10-242165 (FIG. 1, and Pages 3-4)

Patent Literature 2: Japanese Patent Application Laying-Open PublicationNo. H10-270451 (FIG. 1, and Page 4)

SUMMARY OF INVENTION Technical Problem

The object of the present invention is to provide a semiconductor deviceincluding a super junction MOS structure where the reverse recovery timetrr can be shortened without increasing the leakage current between thedrain and the source, and to provide a fabrication method for suchsemiconductor device.

Solution to Problem

According to one aspect of the present invention for achieving theabove-mentioned object, it is provided of a semiconductor devicecomprising: a high resistance first base layer of a first conductivitytype; a drain layer of the first conductivity type formed on a back sidesurface of the first base layer; a second base layer of a secondconductivity type formed on a surface of the first base layer; a sourcelayer of the first conductivity type formed on a surface of the secondbase layer; a gate insulating film disposed on a surface of both thesource layer and the second base layer; a gate electrode disposed on thegate insulating film; a column layer of the second conductivity typeformed in the first base layer of the lower part of both the second baselayer and the source layer by opposing the drain layer; a drainelectrode disposed in the drain layer; and a source electrode disposedon both the source layer and the second base layer, wherein heavyparticle irradiation is performed to the column layer to form a traplevel locally.

According to another aspect of the present invention, it is provided ofa fabrication method for a semiconductor device, the fabrication methodcomprising: forming a high resistance first base layer of a firstconductivity type; forming a drain layer of the first conductivity typeon a back side surface of the first base layer; forming a second baselayer of a second conductivity type on a surface of the first baselayer; forming a source layer of the first conductivity type on asurface of the second base layer; forming a gate insulating film on asurface of both the source layer and the second base layer; forming agate electrode on the gate insulating film; forming a column layer ofthe second conductivity type in the first base layer of a lower part ofboth the second base layer and the source layer by opposing the drainlayer; forming a drain electrode in the drain layer, forming a sourceelectrode on both the source layer and the second base layer; andperforming heavy particle irradiation to the column layer and forming atrap level locally.

Advantageous Effects of Invention

According to the present invention, it can be provided of thesemiconductor device including the super junction MOS structure wherethe reverse recovery time trr can be shortened without increasing theleakage current between the drain and the source, and can be provided ofthe fabrication method for such semiconductor device.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 A schematic cross-sectional configuration diagram of asemiconductor device according to a first embodiment of the presentinvention.

FIG. 2 A schematic bird's-eye view of the semiconductor device accordingto the first embodiment of the present invention.

FIG. 3 A schematic planar pattern configuration diagram of thesemiconductor device according to the first embodiment of the presentinvention.

FIG. 4 An alternative schematic planar pattern configuration diagram ofthe semiconductor device according to the first embodiment of thepresent invention.

FIG. 5 An example of a switching waveform of a comparative example ofthe semiconductor device according to the first embodiment of thepresent invention.

FIG. 6 The schematic cross-sectional configuration diagram explainingthe relation between the irradiation target position and the devicestructure, in the case of ³He⁺⁺ ion irradiation to the semiconductordevice according to the first embodiment of the present invention from aback side surface.

FIG. 7 A diagram showing the relation between a saturation currentI_(DSS) between the drain and the source and a distance from a bottomsurface of a column layer, in the semiconductor device according to thefirst embodiment of the present invention.

FIG. 8 A diagram showing the relation between the reverse recovery timetrr and the distance from the bottom surface of the column layer, in thesemiconductor device according to the first embodiment of the presentinvention.

FIG. 9 A schematic diagram showing the relation between the reverserecovery time trr and the saturation current I_(DSS) between the drainand the source and the distance from the bottom surface of the columnlayer, in the semiconductor device according to the first embodiment ofthe present invention.

FIG. 10 A diagram showing the relation between impurity concentration N,resistivity and sheet resistance R and the distance from the bottomsurface of the column layer, in the semiconductor device related to thefirst embodiment of the present invention.

FIG. 11 A schematic bird's-eye view of a semiconductor device accordingto a conventional example.

FIG. 12 An example of a switching waveform of the semiconductor deviceaccording to the conventional example.

DESCRIPTION OF EMBODIMENTS

Next, embodiments of the present invention will be described withreference to drawings. It explains simple by attaching the samereference numeral as the same block or element to below, in order toavoid duplication of description. However, the drawings are schematicand it should care about differing from an actual thing. Of course, thepart from which the relation or ratio between the mutual sizes differalso in mutually drawings may be included.

The embodiments shown in the following exemplifies the device and methodfor materializing the technical idea of the present invention, and theembodiments of the present invention does not specify assignment of eachcomponent parts, etc. as the following. Various changes can be added tothe technical idea of the present invention in scope of claims.

First Embodiment

(Element Structure)

FIG. 1 shows a schematic cross-section structure of a semiconductordevice according to a first embodiment of the present invention.Moreover, FIG. 2 shows a schematic bird's-eye view structure of thesemiconductor device according to the first embodiment. As shown in FIG.1 to FIG. 2, the semiconductor device according to the first embodimentincludes: an n type impurity doped high resistivity first base layer 12;an n type impurity doped drain layer 10 disposed on the back sidesurface of the first base layer 12; a p type impurity doped second baselayer 16 famed on the surface of the first base layer 12; an n typeimpurity doped source layer 18 famed on the surface of the second baselayer 16; a gate insulating film 20 disposed on the surface of both thesource layer 18 and the second base layer 16; a gate electrode 22disposed on the gate insulating film 20; a p type impurity doped columnlayer 14 famed in the first base layer 12 of the lower part of both thesecond base layer 16 and the source layer 18 by opposing the drain layer10; a drain electrode 28 disposed in the drain layer 10; and a sourceelectrode 26 disposed on both the source layer 18 and the second baselayer 16. An interlayer insulating film 24 is disposed on the gateelectrode 22. Dashed lines shown in FIG. 1 indicate current which flowsbetween the drain and the source. As clearly illustrated in FIGS. 1 and2, the column layer 14 extends in a first direction vertical to aprincipal surface of the drain layer 10, a length of the column layer 14in the first direction being larger than a length thereof in a seconddirection that is parallel to the principal surface of the drain layer10. The column layer 14 and the first base layer 12 are repeatedlyalternately-arranged in the second direction.

In the semiconductor device according to the first embodiment, a traplevel (see “TR” in FIG. 1) is formed locally by performing heavyparticle irradiation to the column layer 14. Thus, as illustrated inFIG. 1, the trap level is formed below the second base layer 16.

P, As, Sb, etc. can be applied as the n type impurity, and B, Al, Ga,etc. can be applied as the p type impurity, for example. Theabove-mentioned impurities can be doped on each layer using diffusiontechnology or ion implantation technology.

A silicon dioxide film, a silicon nitride film, a silicon oxynitridefilm, a hafnium oxide film, an alumina film, a tantalum oxide film, etc.can be applied, for example, as the gate insulating film 20.

Polysilicon can be applied as the gate electrode 22, and aluminum can beapplied to both the drain electrode 28 and the source electrode 26, forexample.

A silicon dioxide film, a silicon nitride film, a tetraethoxy silane(TEOS) film, etc. are applicable, for example, as the interlayerinsulating film 24.

In the example of FIG. 2, the schematic planar pattern configuration ofthe semiconductor device according to the first embodiment shows anexample which is disposed being checkered lattice-like on the basis of arectangular pattern. On the other hand, as shown in FIG. 3, the planarpattern configuration may be disposed being zigzagged checkeredlattice-like on the basis of a rectangular pattern, for example.Alternatively, as shown in FIG. 4, the planar pattern configuration maybe disposed being zigzagged checkered lattice-like on the basis of ahexagonal pattern, for example. Moreover, the planar patternconfiguration is not limited to the rectangle or the hexagon. That is,the planar pattern configuration is also effective on the basis ofcircular, an oval figure, a pentagon, a polygon greater than heptagon,etc. Each of FIG. 3 and FIG. 4 shows schematically the pattern ofsemiconductor layers, such as the first base layer 12, the column layer14, the second base layer 16, and the source layer 18. However,illustrating of the gate electrode 22, the source electrode 26, etc. isomitted.

FIG. 5 shows an example of a switching waveform in the comparativeexample which does not control life time by the heavy particleirradiation, in the semiconductor device according to the firstembodiment. The reverse recovery time trr is 160 nsec according to aresult shown in FIG. 5, and is longer than the reverse recovery timebeing 130 nsec of the conventional example shown in FIG. 12.

FIG. 6 shows a schematic cross-section structure for explaining therelation between an irradiation target position and device structure, inthe case of performing ³He⁺⁺ ion irradiation (IR) to the semiconductordevice according to the first embodiment from the back side surface.

In FIG. 6, WA denotes the thickness of the drain layer 10 measured fromthe back side surface of the semiconductor device. Also, WB denotes thedistance to the bottom surface of the column layer 14 measured from theback side surface of the semiconductor device. In the example shown inFIG. 6, it is WA=208 μm, and is WB=220 μm.

Moreover, as shown in FIG. 6, a coordinate system is defined by applyingthe direction of the source electrode 26 into a positive direction andapplying the direction of the drain layer 10 into a negative directionon the basis of the bottom surface of the column layer 14. Theirradiation target position can be defined as an attenuation peakposition of the range of the heavy ion irradiated from the back sidesurface of the semiconductor device, and can be indicated on theabove-mentioned coordinate system.

(Result of Experiment)

FIG. 7 shows the relation between the saturation current I_(DSS) betweenthe drain and the source and the distance from the bottom surface of thecolumn layer 14 corresponding to the attenuation peak position, in thesemiconductor device according to the first embodiment. FIG. 7 shows thecase of the amount of dosage of ³He ion is set to 1×10¹²/cm², and is setto 5×10¹²/cm².

Moreover, FIG. 8 shows the relation between the reverse recovery timetrr and the distance from the bottom surface of the column layer 14corresponding to the attenuation peak position, in the semiconductordevice according to the first embodiment. FIG. 8 also shows the case ofthe amount of dosage of ³He⁺⁺ ion is set to 1×10¹²/cm², cm and is set to5×10¹²/cm².

As clearly from FIG. 7, the value of the saturation current I_(DSS)between the drain and the source tends to decrease as the distance fromthe bottom surface of the column layer 14 corresponding to theattenuation peak position increases. On the other hand, as clearly fromFIG. 8, the reverse recovery time trr tends to increase as the distancefrom the bottom surface of the column layer 14 corresponding to theattenuation peak position increases.

FIG. 9 shows schematically the relation between: the reverse recoverytime trr and the saturation current I_(DSS) between the drain and thesource; and the distance from the bottom surface of the column layer 14,in the semiconductor device according to the first embodiment.

In the semiconductor device according to the first embodiment, the heavyparticle irradiation is performed so that the attenuation peak positionof the heavy particle irradiation may be included between: the firstposition PB obtained from the relation between the distance from thebottom surface of the column layer 14 and the reverse recovery time trron the basis of the bottom surface of the column layer 14; and thesecond position PA obtained from the relation between the distance fromthe bottom surface of the column layer 14 and the saturation currentI_(DSS) between the drain and the source, and thereby it can be obtainedof the semiconductor device having the reverse recovery time trr shorterthan the reverse recovery time t₀, and having the saturation currentI_(DSS) between the drain and the source smaller than the saturationcurrent I₀ between the drain and the source. In FIG. 9, the curve Ddenotes the attenuation peak curve of the heavy particle irradiation forobtaining the semiconductor device having the reverse recovery time trrshorter than the reverse recovery time t₀, and having the saturationcurrent I_(DSS) between the drain and the source smaller than thesaturation current I₀ between the drain and the source.

Here, the first position PB is the attenuation peak position of theheavy particle irradiation corresponding to the reverse recovery timet₀. Moreover, the second position PA is the attenuation peak position ofthe heavy particle irradiation corresponding to the saturation currentI₀ between the drain and the source. For example, when the reverserecovery time t₀ is set to 80 nsec and the saturation current I₀ betweenthe drain and source is set to 1 μA, it can be obtained of thesemiconductor device whose the reverse recovery time trr<t₀=80 nsec, andthe saturation current between the drain and the source I_(DSS)<I₀=1 μA.

Here, a proton, ³He⁺⁺, or ⁴He⁺⁺ can be used for the particle species forperforming the heavy particle irradiation, for example. When using ⁴He⁺⁺as the particle species for performing the heavy particle irradiation,it is preferable to use the drain layer 10 composed of a thin substrate.

The amount of dosage of the heavy particle irradiation can be set as thescope of 5×10¹⁰/cm² to 5×10¹²/cm², for example.

FIG. 10 shows the relation between the impurity concentration N, theresistivity p, and sheet resistance R and the distance from the bottomsurface of the column layer 14, in the semiconductor device according tothe first embodiment. Corresponding to the tendency of the attenuationpeak curve of heavy particle irradiation, the peak characteristics thatthe resistivity p and sheet resistance R increase are shown, and thepeak characteristics that the impurity concentration N decreases areshown.

(Fabrication Method)

As shown in FIG. 1 to FIG. 2, a fabrication method of the semiconductordevice according to the first embodiment includes: the step of forming ahigh resistivity first base layer 12 of a first conductivity type; thestep of forming a drain layer 10 of the first conductivity type on theback side surface of the first base layer 12; the step of forming asecond base layer 16 of a second conductivity type on the surface of thefirst base layer 12; the step of forming a source layer 18 of the firstconductivity type on the surface of the second base layer 16; the stepof forming a gate insulating film 20 on the surface of both the sourcelayer 18 and the second base layer 16; the step of forming a gateelectrode 22 on the gate insulating film 20; the step of forming acolumn layer 14 of the second conductivity type in the first base layer12 of the lower part of both the second base layer 16 and the sourcelayer 18 by opposing the drain layer 10; the step of forming a drainelectrode 28 in the drain layer 10; the step of forming a sourceelectrode in both the source layer and the second base layer; and thestep of performing heavy particle irradiation to the column layer 14 andforming a trap level locally.

As shown in FIG. 9, the step of forming the trap level locally includes:the step of determining a first position PB based on the relationbetween the distance from the bottom surface of the column layer 14 andthe reverse recovery time trr on the basis of the bottom surface of thecolumn layer 14; the step of determining a second position PA obtainedfrom the relation between the distance from the bottom surface of thecolumn layer 14 and the saturation current I_(DSS) between the drain andthe source; and the step of performing the heavy particle irradiation sothat an attenuation peak position may be included between the firstposition PB and the second position PA.

According to the first embodiment, it can achieve controllingdegradation of both the saturation current I_(DSS) between the drain andthe source and the threshold value voltage between the gate and thesource, and improving the reverse recovery characteristics of a built-indiode. Thus, it is possible to reduce the switching power loss, andreduce the diode reverse recovery loss.

According to the first embodiment, it can be provided of thesemiconductor device including the super junction MOS structure wherethe reverse recovery time trr can be shortened without increasing theleakage current between the drain and the source, and can be provided ofthe fabrication method for such semiconductor device.

Other Embodiments

The present invention has been described by the first embodiment, as adisclosure including associated description and drawings to be construedas illustrative, not restrictive. With the disclosure, a person skilledin the art might easily think up alternative embodiments, embodimentexamples, or application techniques.

Thus, the present invention includes various embodiments etc. which havenot been described in this specification.

INDUSTRIAL APPLICABILITY

The semiconductor device according to the present invention isapplicable to a bridge circuit, a LCD inverter, a motor, automotive HighIntensity Discharge lamp (HID) headlight lighting apparatus, etc. whichuse a high breakdown voltage MOSFET.

REFERENCE SIGNS LIST

-   10: Drain layer;-   12: First base layer;-   14: Column layer;-   16: Second base layer;-   18: Source layer;-   20: Gate insulating film;-   22: Gate electrode;-   24: Interlayer insulating film;-   26: Source electrode; and-   28: Drain electrode.

What is claimed is:
 1. A semiconductor device comprising: a first baselayer of a first conductivity type; a drain layer of the firstconductivity type formed on a back side surface of the first base layer;a second base layer of a second conductivity type formed in a surfaceside of the first base layer; a source layer of the first conductivitytype formed in a surface side of the second base layer; a gateinsulating film disposed on a surface of both the source layer and thesecond base layer; a gate electrode disposed on the gate insulatingfilm; a column layer of the second conductivity type formed in the firstbase layer directly below both the second base layer and the sourcelayer by opposing the drain layer so that a long-side direction of thecolumn layer is a direction vertical to a principal surface of the drainlayer; a drain electrode disposed on the drain layer; and a sourceelectrode disposed on both the source layer and the second base layer,wherein the column layer and the first base layer arealternately-arranged repeatedly in a direction parallel to the principalsurface of the drain layer, and a bottom surface of the column layer anda top surface of the drain layer are separated from each other, whereinspace is defined between a bottom surface of the column layer and theupper surface of the drain layer, the bottom surface of the column layeror an upper portion of the space is subjected to a charged particleirradiation, and a resistance value of the space is increased from thetop surface of the drain layer toward the bottom surface of the columnlayer.
 2. The semiconductor device according to claim 1, wherein acharged particle irradiation is subjected to a lower part of the columnlayer to form the trap level locally.
 3. The semiconductor deviceaccording to claim 2, wherein the trap level is due to the chargedparticle irradiation.
 4. The semiconductor device according to claim 1,wherein the attenuation peak position of the charged particleirradiation is included between: a first position between the bottomsurface of the column layer and the top surface of the drain layer; anda second position between the bottom surface of the column layer and thetop surface of the drain layer, the first position determined byobtaining a distance from the bottom surface of the column layer so thatreverse recovery time is shorter than a predetermined time period, thesecond position determined by obtaining a distance from the bottomsurface of the column layer so that a saturation current between thedrain and the source is lower than a predetermined saturation current,on the basis of the bottom surface of the column layer.
 5. Thesemiconductor device according to claim 1, wherein an amount of dosageof the charged particle irradiation is 5×10¹⁰/cm² to 5×10¹²/cm².
 6. Thesemiconductor device according to claim 1, wherein a planar pattern onthe basis of one of a rectangle and a hexagon is disposed beingcheckered lattice-like or zigzagged checkered lattice-like, in the firstbase layer, the second base layer, and the source layer.
 7. Thesemiconductor device according to claim 1, wherein the bottom surface ofthe column layer and the drain layer are separated by the first baselayer.
 8. The semiconductor device according to claim 2, wherein thetrap level extends over the column layer and the first base layer. 9.The semiconductor device according to claim 1, wherein a distancebetween two neighboring column layers is smaller than a width of each ofthe column layers.
 10. A fabrication method for a semiconductor device,the fabrication method comprising: forming a first base layer of a firstconductivity type; forming a drain layer of the first conductivity typeon a back side surface of the first base layer; forming a second baselayer of a second conductivity type in a surface side in the first baselayer; forming a source layer of the first conductivity type in asurface side in the second base layer; forming a gate insulating film ona surface of both the source layer and the second base layer; forming agate electrode on the gate insulating film; forming a column layer ofthe second conductivity type in the first base layer directly below boththe second base layer and the source layer by opposing the drain layerso that a long-side direction of the column layer is a directionvertical to a principal surface of the drain layer; forming a drainelectrode on the drain layer, forming a source electrode on both thesource layer and the second base layer; and performing a chargedparticle irradiation with respect to the bottom surface of the columnlayer or an upper portion of space, the space being defined between abottom surface of the column layer and the upper surface of the drainlayer, a resistance value of the upper portion of the space beingincreased from the top surface of the drain layer toward the bottomsurface of the column layer, wherein the column layer and the first baselayer are alternately-arranged repeatedly in a direction parallel to theprincipal surface of the drain layer, and a bottom surface of the columnlayer and a top surface of the drain layer are separated from eachother.